TY - GEN
T1 - A microfluidic-electric package for power MEMS generators
AU - Herrault, Florian
AU - Ji, Chang Hyeon
AU - Kim, Seong Hyok
AU - Wu, Xiaosong
AU - Allen, Mark G.
PY - 2008
Y1 - 2008
N2 - This paper reports the design, fabrication, and measurement results of a compact, multi-functional package for air-driven, rotary, electromagnetic MEMS generators. The fully integrated device includes a polymer-based fluidic housing, its associated turbine supported by a small, off-the-shelf, high-speed ball bearing, and a permanent-magnet (PM) generator with electroplated copper windings. The fluidic-electric package has an overall volume of approximately 1.1cm3, and weighs 1.5g. It withstands pressures up to 85kPa, can support rotational speeds up to 203,000 rpm, and generates an electrical output power of 0.8mW, indicating that this packaged machine is applicable to small, low-power systems.
AB - This paper reports the design, fabrication, and measurement results of a compact, multi-functional package for air-driven, rotary, electromagnetic MEMS generators. The fully integrated device includes a polymer-based fluidic housing, its associated turbine supported by a small, off-the-shelf, high-speed ball bearing, and a permanent-magnet (PM) generator with electroplated copper windings. The fluidic-electric package has an overall volume of approximately 1.1cm3, and weighs 1.5g. It withstands pressures up to 85kPa, can support rotational speeds up to 203,000 rpm, and generates an electrical output power of 0.8mW, indicating that this packaged machine is applicable to small, low-power systems.
UR - http://www.scopus.com/inward/record.url?scp=50149112856&partnerID=8YFLogxK
U2 - 10.1109/MEMSYS.2008.4443605
DO - 10.1109/MEMSYS.2008.4443605
M3 - Conference contribution
AN - SCOPUS:50149112856
SN - 9781424417933
T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
SP - 112
EP - 115
BT - MEMS 2008 Tucson - 21st IEEE International Conference on Micro Electro Mechanical Systems
T2 - 21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008 Tucson
Y2 - 13 January 2008 through 17 January 2008
ER -