A microfluidic-electric package for power MEMS generators

Florian Herrault, Chang Hyeon Ji, Seong Hyok Kim, Xiaosong Wu, Mark G. Allen

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

6 Scopus citations

Abstract

This paper reports the design, fabrication, and measurement results of a compact, multi-functional package for air-driven, rotary, electromagnetic MEMS generators. The fully integrated device includes a polymer-based fluidic housing, its associated turbine supported by a small, off-the-shelf, high-speed ball bearing, and a permanent-magnet (PM) generator with electroplated copper windings. The fluidic-electric package has an overall volume of approximately 1.1cm3, and weighs 1.5g. It withstands pressures up to 85kPa, can support rotational speeds up to 203,000 rpm, and generates an electrical output power of 0.8mW, indicating that this packaged machine is applicable to small, low-power systems.

Original languageEnglish
Title of host publicationMEMS 2008 Tucson - 21st IEEE International Conference on Micro Electro Mechanical Systems
Pages112-115
Number of pages4
DOIs
StatePublished - 2008
Event21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008 Tucson - Tucson, AZ, United States
Duration: 13 Jan 200817 Jan 2008

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)1084-6999

Conference

Conference21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008 Tucson
Country/TerritoryUnited States
CityTucson, AZ
Period13/01/0817/01/08

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