A fully wafer-level packaged RF MEMS switch with low actuation voltage using a piezoelectric actuator

Jae Hyoung Park, Hee Chul Lee, Yong Hee Park, Yong Dae Kim, Chang Hyeon Ji, Jonguk Bu, Hyo Jin Nam

Research output: Contribution to journalArticlepeer-review

65 Scopus citations

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Engineering & Materials Science

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