A 6.5/17.5-GHz dual-channel interferometer-based capacitive Sensor in 65-nm CMOS for high-speed flow cytometry

Jun Chau Chien, Mekhail Anwar, Erh Chia Yeh, Luke P. Lee, Ali M. Niknejad

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

19 Scopus citations

Abstract

In this paper, a dual-channel interferometer-based capacitive sensor with high sensitivity is implemented in 65nm CMOS. Such architecture facilitates high throughput flow cytometry applications using intrinsic EM signatures of biological cells. To enhance SNR, injection-locked oscillator is utilized to perform phase amplification with regard to capacitance-induced frequency shift. Noise from on-chip QVCO is further reduced through I/Q interpolation. Measurements show that the sensor achieves better than 1.5 aF of sensitivity at 250-kHz equivalent noise-bandwidth. With the aid of 3D hydrodynamic focusing, flow cytometry is tested with polystyrene beads. The proposed dual-channel sensor consumes 30 mW under 1 V supply.

Original languageEnglish
Title of host publication2014 IEEE MTT-S International Microwave Symposium, IMS 2014
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Print)9781479938698
DOIs
StatePublished - 2014
Event2014 IEEE MTT-S International Microwave Symposium, IMS 2014 - Tampa, FL, United States
Duration: 1 Jun 20146 Jun 2014

Publication series

NameIEEE MTT-S International Microwave Symposium Digest
ISSN (Print)0149-645X

Conference

Conference2014 IEEE MTT-S International Microwave Symposium, IMS 2014
Country/TerritoryUnited States
CityTampa, FL
Period1/06/146/06/14

Keywords

  • capacitive sensor
  • flow cytometry
  • injection-locked oscillators
  • interferometer
  • microfluidics
  • permittivity

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