A 2-D translational pinhole formed by two orthogonally moving micro-slits

N. Chronis; M. Okandan; M. Baker; L. P. Lee

doi:10.1109/SENSOR.2005.1496629

A 2-D translational pinhole formed by two orthogonally moving micro-slits

N. Chronis, M. Okandan, M. Baker, L. P. Lee

Department of Chemistry & Nanoscience

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

1 Scopus citations

Abstract

Pinhole alignment is a tedious procedure that strongly affects the overall performance of an optical system. In order to address this critical issue, we developed a 2-D translational pinhole, which is formed by two orthogonally moving micro-slits. The MEMS pinhole, fabricated by a modified SUMMIT-V process, can be positioned within a range of 30×30 microns in the XY plane. Alternatively, it can be used in a scanning mode at driving frequencies up to -200Hz without any noticeable amplitude decrease. Typical applications include confocal scanning opthalmoscopes, laser beam profilers, and MEMS confocal microscopes.

Original language	English
Title of host publication	TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers
Pages	1022-1025
Number of pages	4
DOIs	https://doi.org/10.1109/SENSOR.2005.1496629
State	Published - 2005
Event	13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05 - Seoul, Korea, Republic of Duration: 5 Jun 2005 → 9 Jun 2005

Publication series

Name	Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05
Volume	1

Conference

Conference	13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05
Country/Territory	Korea, Republic of
City	Seoul
Period	5/06/05 → 9/06/05

Keywords

Confocal microscopy
MEMS pinhole
Moving micro-slit
Translational pinhole

Access to Document

10.1109/SENSOR.2005.1496629

Cite this

Chronis, N., Okandan, M., Baker, M., & Lee, L. P. (2005). A 2-D translational pinhole formed by two orthogonally moving micro-slits. In TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers (pp. 1022-1025). Article 2E4.142 (Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05; Vol. 1). https://doi.org/10.1109/SENSOR.2005.1496629

Chronis, N. ; Okandan, M. ; Baker, M. et al. / A 2-D translational pinhole formed by two orthogonally moving micro-slits. TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers. 2005. pp. 1022-1025 (Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05).

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abstract = "Pinhole alignment is a tedious procedure that strongly affects the overall performance of an optical system. In order to address this critical issue, we developed a 2-D translational pinhole, which is formed by two orthogonally moving micro-slits. The MEMS pinhole, fabricated by a modified SUMMIT-V process, can be positioned within a range of 30×30 microns in the XY plane. Alternatively, it can be used in a scanning mode at driving frequencies up to -200Hz without any noticeable amplitude decrease. Typical applications include confocal scanning opthalmoscopes, laser beam profilers, and MEMS confocal microscopes.",

keywords = "Confocal microscopy, MEMS pinhole, Moving micro-slit, Translational pinhole",

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Chronis, N, Okandan, M, Baker, M & Lee, LP 2005, A 2-D translational pinhole formed by two orthogonally moving micro-slits. in TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers., 2E4.142, Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05, vol. 1, pp. 1022-1025, 13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05, Seoul, Korea, Republic of, 5/06/05. https://doi.org/10.1109/SENSOR.2005.1496629

A 2-D translational pinhole formed by two orthogonally moving micro-slits. / Chronis, N.; Okandan, M.; Baker, M. et al.
TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers. 2005. p. 1022-1025 2E4.142 (Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05; Vol. 1).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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Chronis N, Okandan M, Baker M, Lee LP. A 2-D translational pinhole formed by two orthogonally moving micro-slits. In TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers. 2005. p. 1022-1025. 2E4.142. (Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05). doi: 10.1109/SENSOR.2005.1496629

A 2-D translational pinhole formed by two orthogonally moving micro-slits

Abstract

Publication series

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Keywords

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