Abstract
This paper presents a new type of biaxial scanning micromirror fabricated with 3D printing technology. The fabricated device is electromagnetically actuated with external coils and moving magnets embedded in the structural layer of the device. With the fabricated device, the maximum optical scan angle of 11 degrees and 10.3 degrees have been obtained for vertical and horizontal scan modes, respectively. Proposed scanning micromirror design and fabrication approach using 3D printing can be utilized in various applications, including biomedical imaging systems with further device optimization.
| Original language | English |
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| Title of host publication | 2020 International Conference on Electronics, Information, and Communication, ICEIC 2020 |
| Publisher | Institute of Electrical and Electronics Engineers Inc. |
| ISBN (Electronic) | 9781728162898 |
| DOIs | |
| State | Published - Jan 2020 |
| Event | 2020 International Conference on Electronics, Information, and Communication, ICEIC 2020 - Barcelona, Spain Duration: 19 Jan 2020 → 22 Jan 2020 |
Publication series
| Name | 2020 International Conference on Electronics, Information, and Communication, ICEIC 2020 |
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Conference
| Conference | 2020 International Conference on Electronics, Information, and Communication, ICEIC 2020 |
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| Country/Territory | Spain |
| City | Barcelona |
| Period | 19/01/20 → 22/01/20 |
Bibliographical note
Funding Information:This work was supported by Basic Science Research Program through the National Research Foundation of Korea (NRF) funded by the Ministry of Education (NRF-2017R1A2B4007830), and by the EU Framework program of the National Research Foundation (NRF) funded by the Ministry of Science, ICT & Future Planning (2014K1B1A1073720).
Publisher Copyright:
© 2020 IEEE.
Keywords
- 3D printing
- Biomedical imaging
- Electromagnetic actuation
- Scanning micromirror