@inproceedings{ee9fe709032747c9abc46316d6b50b73,
title = "2-D forward optical scanner with glass microlens and isolation blocks using thermal reflow",
abstract = "We present a novel fabrication method of a two-dimensional forward optical scanner with integrated microlens. Glass microlens and electrical isolation blocks were integrated with silicon XY-stage using thermal reflow process. Measured scan angles in X and Y directions at resonance were ±4.9°and ±5.0°, respectively, at atmospheric pressure.",
keywords = "2-D forward optical scanner, glass microlens, isolation block, microlens assembly, thermal reflow",
author = "Sunghyun Yoo and Jin, {Joo Young} and Ha, {Joon Geun} and Ji, {Chang Hyeon} and Kim, {Yong Kweon}",
year = "2012",
doi = "10.1109/OMEMS.2012.6318849",
language = "English",
isbn = "9781457715112",
series = "International Conference on Optical MEMS and Nanophotonics",
pages = "154--155",
booktitle = "2012 International Conference on Optical MEMS and Nanophotonics, OMN 2012",
note = "2012 International Conference on Optical MEMS and Nanophotonics, OMN 2012 ; Conference date: 06-08-2012 Through 09-08-2012",
}